Effect of Catalytic contact on Methane Sensitivity using Chemically deposited Zinc Oxide thin Film
نویسندگان
چکیده
Nanocrystalline n type ZnO thin films were deposited on SiO2-coated (0.4 μm) p-Si substrates (10-20Ω-cm, 400 μm) by a low cost chemical deposition technique to fabricate ZnO-based resistive sensors for methane detection. The nanocrystalline ZnO needle like structures were grown on RCA cleaned p-Si substrates by successive immersion (100-200 times) into a Sodium
منابع مشابه
Synthesis of Zinc Oxide Nanostructured Thin Film by Sol- Gel Method and Evaluation of Gas Sensing Properties
Ethanol (C2H6O) sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol–gel method and dip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding Tetra ethanol-amine. The as-coated films were preheated at 150 ºC fo...
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